Post-fabrication frequency trimming of coplanar-waveguide resonators in circuit QED quantum processors - INSPIRE

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Post-fabrication frequency trimming of coplanar-waveguide resonators in circuit QED quantum processors

S. Vallés-Sanclemente
(
- Delft Tech. U. and
- KIN, Delft
)
,
S.L. M. van der Meer
(
- Delft Tech. U. and
- KIN, Delft
)
,
M. Finkel
(
- Delft Tech. U. and
- KIN, Delft
)
,
N. Muthusubramanian
(
- Delft Tech. U. and
- KIN, Delft
)
,
M. Beekman
(
- Delft Tech. U. and
- Hague TNO, Physics Lab
)

Feb 21, 2023

8 pages

Published in:

Appl.Phys.Lett. 123 (2023) 3, 034004

Published: Jul 17, 2023

e-Print:

2302.10705 [quant-ph]

DOI:

10.1063/5.0148222

View in:

ADS Abstract Service

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Abstract: (AIP)

We present the use of a set of airbridges to trim the frequency of microwave coplanar-waveguide (CPW) resonators post-fabrication. This method is compatible with the fabrication steps of conventional CPW airbridges and crossovers and increases device yield by allowing compensation of design and fabrication uncertainty with 100 MHz100 MHz range and 10 MHz10 MHz resolution. We showcase two applications in circuit QED. The first is the elimination of frequency collisions between resonators intended to readout different transmons by frequency-division multiplexing. The second is frequency matching of readout and Purcell-filter resonator pairs. Combining this matching with transmon frequency trimming by laser annealing reliably achieves fast and high-fidelity readout across 17-transmon quantum processors.

Note:

8 pages and 6 figures

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