Investigation of CMOS pixel sensor with 0.18 μm CMOS technology for high-precision tracking detector - INSPIRE

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Investigation of CMOS pixel sensor with 0.18 μm CMOS technology for high-precision tracking detector

L. Zhang
(
- Shandong U.
)
,
M. Fu
(
- Ocean U.
)
,
Y. Zhang
(
- Beijing, Inst. High Energy Phys.
)
,
W. Yan
(
- Shandong U.
)
,
M. Wang
(
- Shandong U.
)

Jan 2, 2017

9 pages

Part of Proceedings, 18th International Workshop on Radiation Imaging Detectors (IWORID 2016) : Barcelona, Spain, July 3-7, 2016

Published in:

JINST 12 (2017) 01, C01011

Contribution to:

- iWoRiD 2016

Published: Jan 2, 2017

DOI:

10.1088/1748-0221/12/01/C01011

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Abstract: (IOP)

The Circular Electron Positron Collider (CEPC) proposed by the Chinese high energy physics community is aiming to measure Higgs particles and their interactions precisely. The tracking detector including Silicon Inner Tracker (SIT) and Forward Tracking Disks (FTD) has driven stringent requirements on sensor technologies in term of spatial resolution, power consumption and readout speed. CMOS Pixel Sensor (CPS) is a promising candidate to approach these requirements. This paper presents the preliminary studies on the sensor optimization for tracking detector to achieve high collection efficiency while keeping necessary spatial resolution. Detailed studies have been performed on the charge collection using a 0.18 μm CMOS image sensor process. This process allows high resistivity epitaxial layer, leading to a significant improvement on the charge collection and therefore improving the radiation tolerance. Together with the simulation results, the first exploratory prototype has bee designed and fabricated. The prototype includes 9 different pixel arrays, which vary in terms of pixel pitch, diode size and geometry. The total area of the prototype amounts to 2 × 7.88 mm(2).

Particle tracking detectors
Pixelated detectors and associated VLSI electronics
Simulation methods and programs
semiconductor detector: pixel
charge: yield
semiconductor detector: technology
tracking detector
spatial resolution
electron positron: colliding beams
semiconductor detector: design

References(9)

Figures(0)

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