Broadband thermomechanically limited sensing with an optomechanical accelerometer - INSPIRE

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Broadband thermomechanically limited sensing with an optomechanical accelerometer

Feng Zhou
(
- NIST, Wash., D.C.
)
,
Feng Zhou
(
- Unlisted, US
)
,
Yiliang Bao
(
- NIST, Wash., D.C.
)
,
Yiliang Bao
(
- Unlisted, US
)
,
Ramgopal Madugani
(
- NIST, Wash., D.C.
)

Mar 9, 2021

7 pages

Published in:

Optica 8 (2021) 3, 350-356

Published: Mar 9, 2021

DOI:

10.1364/OPTICA.413117

reference search20 citations

Citations per year

Abstract: (OSA Publishing)

Acceleration measurement is widely used in commercial, scientific, and defense applications, but the resolution and accuracy achievable for demanding applications is limited by the current technology used to build and calibrate accelerometers. We report an optomechanical accelerometer based on a Fabry–Perot microcavity in a silicon chip that is extremely precise, field deployable, and can self-calibrate. The measured acceleration resolution is the highest reported to date for a microfabricated optomechanical accelerometer and is achieved over a wide frequency range (314nm⋅s−2/√Hz over 6.8 kHz). The combination of a single vibrational mode in the mechanical spectrum and the broadband thermally limited resolution enables accurate conversion from sensor displacement to acceleration. This also allows measurement of acceleration directly in terms of the laser wavelength, making it possible for sensors to calibrate internally and serve as intrinsic standards. This sensing platform is applicable to a range of measurements from industrial accelerometry and inertial navigation to gravimetry and fundamental physics.

Chemical vapor deposition
Fiber Bragg gratings
Fused silica
Photonic crystal cavities
Tunable diode lasers
Variable optical attenuators

References(28)

Figures(0)

[1]

Micromachined inertial sensors

N. Yazdi
,
F. Ayazi
,
K. Najafi

- IEEE Proc. 86 (1998) 1640-1659
•
DOI:
- 10.1109/5.704269

[2]

MEMS inertial sensors: a tutorial overview

D.K. Shaeffer

- IEEE Commun.Mag. 51 (2013) 100-109
•
DOI:
- 10.1109/MCOM.2013.6495768

[3]

Probing oil fields

H. Nakstad
,
J. Kringlebotn

•
DOI:
- 10.1038/nphoton.2008.18

[4]

Measurement of the Earth tides with a MEMS gravimeter

R.P. Middlemiss
,
A. Samarelli
,
D.J. Paul
,
J. Hough
,
S. Rowan

et al.

- Nature 531 (2016) 614-617
•
DOI:
- 10.1038/nature17397

[5]

Development of high-sensitivity accelerometer board for structural health monitoring

H. Jo
,
J.A. Rice
,
B.F. Spencer
,
T. Nagayama

- Proc.SPIE Int.Soc.Opt.Eng. 7647 (2010) 764706
•
DOI:
- 10.1117/12.848905

[6]

Optical accelerometer

A.R. Nelson
,
G.R. Elion

[7]

High-sensitivity fibre-optic accelerometer

A.D. Kersey
,
D.A. Jackson
,
M. Corke

- Electron.Lett. 18 (1982) 559-561
•
DOI:
- 10.1049/el:19820379

[8]

Experimental demonstration of a fiber Bragg grating accelerometer

T.A. Berkoff
,
A.D. Kersey

•
DOI:
- 10.1109/68.544716

[9]

Cavity Optomechanics

Markus Aspelmeyer
(
- Vienna U.
)
,
Tobias J. Kippenberg
(
- Ecole Polytechnique, Lausanne
)
,
Florian Marquardt
(
- Erlangen - Nuremberg U. and
- Unlisted, DE
)

- Rev.Mod.Phys. 86 (2014) 1391
•
e-Print:
- 1303.0733
•
DOI:
- 10.1103/RevModPhys.86.1391

[10]

A hybrid on-chip optomechanical transducer for ultrasensitive force measurements

E. Gavartin
,
P. Verlot
,
T.J. Kippenberg

- Nanotechnol. 7 (2012) 509-514
•
DOI:
- 10.1038/nnano.2012.97

[11]

Nanocavity optomechanical torque magnetometry and radiofrequency susceptometry

M. Wu
,
N.L.Y. Wu
,
T. Firdous
,
F.F. Sani
,
J.E. Losby

et al.

- Nanotechnol. 12 (2017) 127-131
•
DOI:
- 10.1038/nnano.2016.226

[12]

Observation of Gravitational Waves from a Binary Black Hole Merger

LIGO Scientific and
Virgo

Collaborations

•

B.P. Abbott
(
- Caltech
)

et al.

- Phys.Rev.Lett. 116 (2016) 6, 061102
•
e-Print:
- 1602.03837
•
DOI:
- 10.1103/PhysRevLett.116.061102

[13]

A high-resolution microchip optomechanical accelerometer

- Nature Photon. 6 (2012) 11, 768-772
•
DOI:
- 10.1038/nphoton.2012.245

[14]

High sensitivity optomechanical reference accelerometer over 10 kHz

- Appl.Phys.Lett. 104 (2014) 221111,
- Appl.Phys.Lett. 104 (2014) 221111
•
e-Print:
- 1303.1188
•
DOI:
- 10.1063/1.4881936

[15]

Optomechanical reference accelerometer

Oliver Gerberding
(
- NIST, Wash., D.C. and
- Joint Quantum Inst., College Park
)
,
Felipe Guzman Cervantes
(
- NIST, Wash., D.C. and
- Joint Quantum Inst., College Park
)
,
John Melcher
(
- NIST, Wash., D.C.
)
,
Jon Pratt
(
- NIST, Wash., D.C.
)
,
Jacob Taylor
(
- NIST, Wash., D.C. and
- Joint Quantum Inst., College Park
)

- Metrologia 52 (2015) 5, 654
•
e-Print:
- 1504.01055
•
DOI:
- 10.1088/0026-1394/52/5/654

[16]

DOI:
- 10.1109/JLT.2018.2853984

[17]

A chip-scale oscillation-mode optomechanical inertial sensor near the thermodynamical limits

Y. Huang
,
J.G. Flor Flores
,
Y. Li
,
W. Wang
,
D. Wang

et al.

•
DOI:
- 10.1002/lpor.201800329

[18]

Practical realization of the definition of the metre, including recommended radiations of other optical frequency standards (2001)

T.J. Quinn

- Metrologia 40 (2003) 103-133
•
DOI:
- 10.1088/0026-1394/40/2/316

[19]

Mechanical-thermal noise in micromachined acoustic and vibration sensors

T.B. Gabrielson

- IEEE Trans.Electron.Dev. 40 (1993) 903-909
•
DOI:
- 10.1109/16.210197

[20]

Fundamental noise limits for miniature acoustic and vibration sensors

T.B. Gabrielson

•
DOI:
- 10.1115/1.2874471

[21]

Measurement of quantum back action in the audio band at room temperature

Jonathan Cripe
(
- Louisiana State U.
)
,
Nancy Aggarwal
(
- MIT
)
,
Robert Lanza
(
- MIT
)
,
Adam Libson
(
- MIT
)
,
Robinjeet Singh
(
- Louisiana State U.
)

et al.

- Nature 568 (2019) 7752, 364-367
•
DOI:
- 10.1038/s41586-019-1051-4

[22]

Search for composite dark matter with optically levitated sensors

Fernando Monteiro
(
- Yale U.
)
,
Gadi Afek
(
- Yale U.
)
,
Daniel Carney
(
- Joint Quantum Inst., College Park and
- Fermilab
)
,
Gordan Krnjaic
(
- Fermilab and
- Chicago U., KICP
)
,
Jiaxiang Wang
(
- Yale U.
)

et al.

- Phys.Rev.Lett. 125 (2020) 18, 181102
•
e-Print:
- 2007.12067
•
DOI:
- 10.1103/PhysRevLett.125.181102

[23]

Mechanical Quantum Sensing in the Search for Dark Matter

D. Carney
(
- Joint Quantum Inst., College Park and
- Fermilab
)
,
G. Krnjaic
(
- Fermilab and
- Chicago U., EFI and
- Chicago U., KICP
)
,
D.C. Moore
(
- Yale U.
)
,
C.A. Regal
(
- JILA, Boulder and
- Colorado U.
)
,
G. Afek
(
- Yale U.
)

et al.

- Quantum Sci.Technol. 6 (2021) 024002
•
e-Print:
- 2008.06074
•
DOI:
- 10.1088/2058-9565/abcfcd

[24]

Searching for Ultralight Dark Matter with Optical Cavities

Andrew A. Geraci
(
- Northwestern U.
)
,
Colin Bradley
(
- Nevada U., Reno
)
,
Dongfeng Gao
(
- Ctr. Cold Atom Phys., Wuhan
)
,
Jonathan Weinstein
(
- Nevada U., Reno
)
,
Andrei Derevianko
(
- Nevada U., Reno
)

- Phys.Rev.Lett. 123 (2019) 3, 031304
•
e-Print:
- 1808.00540
•
DOI:
- 10.1103/PhysRevLett.123.031304

[25]

Ultralight dark matter detection with mechanical quantum sensors

D. Carney
,
A. Hook
,
Z. Liu
,
J.M. Taylor
,
Y. Zhao

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