Epitaxial titanium nitride microwave resonators: Structural, chemical, electrical, and microwave properties - INSPIRE

DataBETA

Epitaxial titanium nitride microwave resonators: Structural, chemical, electrical, and microwave properties

Nov 7, 2021

11 pages

Published in:

Physical Review Materials 6 (2022) 3, 036202

Published: Mar 24, 2022

e-Print:

2111.04227 [physics.app-ph]

DOI:

10.1103/PhysRevMaterials.6.036202 (publication)

View in:

ADS Abstract Service

reference search6 citations

Citations per year

Abstract: (APS)

Titanium nitride is an attractive material for a range of superconducting quantum-circuit applications owing to its low microwave losses, high surface inductance, and chemical stability. The physical properties and device performance, nevertheless, depend strongly on the quality of the materials. In this paper, we focus on the highly crystalline and epitaxial titanium nitride thin films deposited on sapphire substrates using magnetron sputtering at an intermediate temperature (

300^{\circ} C

). We performed a set of systematic and comprehensive material characterizations to thoroughly understand the structural, chemical, and transport properties. Microwave losses at low temperatures were studied using patterned microwave resonators, where the best internal quality factor in the single-photon regime is measured to be

3.3 \times 10^{6}

and that in the high-power regime

> 1.0 \times 10^{7}

. Adjusted with the material filling factor of the resonators, the microwave loss-tangent here compares well with the previously reported best values for superconducting resonators. This work lays the foundation of using epitaxial titanium nitride for low-loss superconducting quantum circuits.

References(50)

Figures(7)

[1]

M.H. Devoret
,
R.J. Schoelkopf

- Science 339 (2013) 1169

[2]

M. Kjaergaard
,
M.E. Schwartz
,
J. Braumüller
,
P. Krantz
,
J.I.-J. Wang

et al.

- Ann.Rev.Condensed Matter Phys. 11 (2020) 369

[3]

Materials in superconducting quantum bits

William D. Oliver
(
- MIT, Lincoln Lab
)
,
Paul B. Welander
(
- SLAC
)

- MRS Bull. 38 (2013) 10, 816-825
•
DOI:
- 10.1557/mrs.2013.229

[4]

Low loss superconducting titanium nitride coplanar waveguide resonators

et al.

- Appl.Phys.Lett. 97 (2010) 23, 232509
•
DOI:
- 10.1063/1.3517252

[5]

Design and Testing of Kinetic Inductance Detectors Made of Titanium Nitride

- J.Low Temp.Phys. 167 (2012) 305
•
e-Print:
- 1309.4317
•
DOI:
- 10.1007/s10909-012-0484-z

[6]

Improved superconducting qubit coherence using titanium nitride

Josephine B. Chang
(
- IBM Watson Res. Ctr.
)
,
Michael R. Vissers
(
- NIST, Boulder
)
,
Antonio D. Córcoles
(
- IBM Watson Res. Ctr.
)
,
Martin Sandberg
(
- NIST, Boulder
)
,
Jiansong Gao
(
- NIST, Boulder
)

et al.

- Appl.Phys.Lett. 103 (2013) 1, 012602
•
DOI:
- 10.1063/1.4813269

[7]

Comparison of dielectric loss in titanium nitride and aluminum superconducting resonators

et al.

- Appl.Phys.Lett. 117 (2020) 12, 124004
•
DOI:
- 10.1063/5.0021950

[8]

Y. Krockenberger
,
S.I. Karimoto
,
H. Yamamoto
,
K. Semba

- J.Appl.Phys. 112 (2012) 083920

[9]

J.T. Peltonen
,
P.C.J.J. Coumou
,
Z.H. Peng
,
T.M. Klapwijk
,
J.S. Tsai

et al.

- Sci.Rep. 8 (2018) 10033

[10]

E.F.C. Driessen
,
P.C.J.J. Coumou
,
R.R. Tromp
,
P.J. de Visser
,
T.M. Klapwijk

- Phys.Rev.Lett. 109 (2012) 107003

[11]

S. Ohya
,
B. Chiaro
,
A. Megrant
,
C. Neill
,
R. Barends

et al.

- Supercond.Sci.Technol. 27 (2014) 015009

[12]

C.J. Richardson
,
A. Alexander
,
C.G. Weddle
,
B. Arey
,
M. Olszta

- J.Appl.Phys. 127 (2020) 235302

[13]

Study of loss in superconducting coplanar waveguide resonators

- J.Appl.Phys. 109 (2011) 6, 063915
•
DOI:
- 10.1063/1.3552890

[14]

Etch induced microwave losses in titanium nitride superconducting resonators

et al.

- Appl.Phys.Lett. 100 (2012) 26, 262605
•
DOI:
- 10.1063/1.4729623

[15]

Reducing intrinsic loss in superconducting resonators by surface treatment and deep etching of silicon substrates

et al.

- Appl.Phys.Lett. 106 (2015) 18, 182601
•
DOI:
- 10.1063/1.4919761

[16]

Analysis and mitigation of interface losses in trenched superconducting coplanar waveguide resonators

et al.

- Appl.Phys.Lett. 112 (2018) 6, 062601
•
DOI:
- 10.1063/1.5006888

[17]

E.H. Lock
,
P. Xu
,
T. Kohler
,
L. Camacho
,
J. Prestigiacomo

et al.

- IEEE Trans.Appl.Supercond. 29 (2019) 1700108

[18]

Surface participation and dielectric loss in superconducting qubits

et al.

- Appl.Phys.Lett. 107 (2015) 16, 162601
•
DOI:
- 10.1063/1.4934486

[19]

Characterization and reduction of capacitive loss induced by sub-micron Josephson junction fabrication in superconducting qubits

et al.

- Appl.Phys.Lett. 111 (2017) 2, 022601
•
DOI:
- 10.1063/1.4993577

[20]

Materials loss measurements using superconducting microwave resonators

C.R. H. McRae
(
- Colorado U. and
- NIST, Boulder and
- JILA, Boulder and
- U. Colorado, Boulder
)
,
H. Wang
(
- Colorado U. and
- NIST, Boulder and
- JILA, Boulder and
- U. Colorado, Boulder
)
,
J. Gao
(
- Colorado U. and
- NIST, Boulder
)
,
M.R. Vissers
(
- NIST, Boulder
)
,
T. Brecht
(
- Hughes Res. Labs, Malibu
)

et al.

- Rev.Sci.Instrum. 91 (2020) 9, 091101
•
DOI:
- 10.1063/5.0017378

[21]

N.A. Saveskul
,
N.A. Titova
,
E.M. Baeva
,
A.V. Semenov
,
A.V. Lubenchenko

et al.

- Phys.Rev.Applied 12 (2019) 054001

[22]

Proceedings of the National Academy of Sciences of the United States of America 111, 7546

G.V. Naik
,
B. Saha
,
J. Liu
,
S.M. Saber
,
E.A. Stach

et al.

[23]

Growth of titanium-nitride thin films for low-loss superconducting quantum circuits, Ph.D. thesis, University of Illinois at Urbana-Champaign

G.A. Olson

[24]

A. Torgovkin
,
S. Chaudhuri
,
A. Ruhtinas
,
M. Lahtinen
,
T. Sajavaara

et al.

- Supercond.Sci.Technol. 31 (2018) 055017

[25]

D. Rasic
,
R. Sachan
,
M.F. Chisholm
,
J. Prater
,
J. Narayan

- Cryst.Growth Des. 17 (2017) 6634

1-25 of 50
1
2
25 / page