Multitechnique investigation of Ta(2)O(5) films on SiO(2) substrates: Comparison of optical, chemical and morphological properties
2010
6 pages
Published in:
- J.Phys.Conf.Ser. 228 (2010) 012020
Contribution to:
Citations per year
Abstract: (IOP)
Ta(2)O(5) mechanical losses seem to be the main cause of mirror thermal noise, limiting current interferometric gravitational wave detectors sensitivity in the 50-300 Hz frequency range. Work is in progress for the identification of these relaxati on processes probably related with lattice defects and impurities that are distributed both in the mirror bulk and at the surface, in order to introduce step by step the suitable modifications in the samples until a stable 'optimum performance' is obtaine d both from the optical and the thermo-mechanical point of view. Here we present our first results of a multitechnique characterization of Ta(2)O(5) films deposited on SiO(2) substrates. Optical, chemical and morphological properties have been investigate d by means of Spectroscopic Ellipsometry, X-ray Photoelectron Spectroscopy and Atomic Force Microscopy. Measurements carried out on pure bulk Ta(2)O(5) samples will be also reported for comparison.References(8)
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