A vertically integrated pixel readout device for the Vertex Detector at the International Linear Collider

Dec, 2008

Citations per year

20092013201720212025120
Abstract: (IEEE)
Tracking and vertexing in future High-Energy Physics (HEP) experiments involves construction of detectors composed of up to a few billions of channels. Readout electronics must record the position and time of each measurement with the highes t achievable precision. This paper reviews a prototype of the first 3D readout chip for HEP, designed for a vertex detector at the International Linear Collider. The prototype features 20×\,\times \,20 μm2{\mu}{\rm m}{2} pixels, laid out in an array of 64×\,\times \,64 elements and was fabricated in a 3-tier 0.18 μm{\mu{\rm m}} Fully Depleted SOI CMOS process at MIT-Lincoln Laboratory. The tests showed correct functional operation of the structure. The chip performs a zero-suppressed readout. < /para>
  • pixel
  • electronics: readout
  • integrated circuit: design
  • fabrication
  • performance
  • ILC Coll